Blog
International Conference on Ion Implantation and Annealing Technology (IIT) 2026
We are pleased to be part of IIT 2026 in Villach — both as an invited speaker and as an exhibitor.
Meet us at Congress Center Villach, 1st Floor, Booth #26
Press Release – 2026-09-12
We proudly announce strategic partnership with RTPRepair to strengthen our U.S. Customer Support
Edge Guard Ring (Slip Guard Ring) in Rapid Thermal Processing Chambers
A Silicon Guard Ring, also known as a Slip Guard Ring, is a circular silicon component placed around the wafer during Rapid Thermal Processing (RTP). Its primary purpose is to stabilize the thermal environment at the wafer edge, where temperature gradients are typically highest.