| Europe | European | project | REACTION System, process and device technology | Plasma Oxidation and Surface Treament for first European 200 mm SiC Pilot Line |
| Europe | European | project | WAYTOGO FAST Technology development | Interlayer dielectrics for FDSOI applications |
| Europe | European | project | SEA4KET Technology development | System development for dedicated compound semiconductor technology |
| Europe | European | project | Supertheme System, process and device technology | Process variations and simulation |
| Europe | European | project | EEM450PR Feasibility study | System development for 450 mm substrates |
| Europe | European | project | SEAL Technology development | System development for dedicated Si technology |
| Germany | Bavaria | | Innovation award Software development | System control software and graphical user interface |
