Pyrometry
We offer various pyrometers with multiple measurement wavelengths and bandwidths. Different sensor types and measurement principles cover the whole range from room temperature to 1700 °C.
Our development focusses on intrinsic stability and accuracy with unique background signal minimization. Our pyrometers provide output signals equivalent to the incoming radiation over several orders of magnitude independent from distance between object and pyrometer. Monitoring of various pyrometer specific signals and parameters ensure its stability.
Our pyrometers are applied in FEoL equipment like Rapid Thermal Processing (RTP) tools or plasma oxidation/nitridation equipments.
The calculation of corresponding temperature and emissivity is customer and application specific.