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Hyperion LT

HyperionLT with two FOUP loaders, 300 mm configuration

HyperionLT with two FOUP loaders, 300 mm configuration

300 mm Front Open Unified Pods (FOUP)

300 mm Front Open Unified Pods (FOUP) 

Touchscreen Graphical User Interface (HQ-D SEC)

Touchscreen Man Machine Interface (HQ-D SEC)

Our low temperature microwave plasma oxidation and nitridation system is equipped with our unique microwave plasma stick array and optional lower tungsten halogen lamp field for additional and separate rapid thermal heating of waver sizes 50 to 300 mm.