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HQ-Dielectrics® is an independent German company with unique expertise in equipment engineering, manufacturing and technology development for the semiconductor production value chain. We supply solutions for front-end of line (FEoL) processing in thin film technologies and innovative process engineering.



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Dielektrikum, High Quality

HQ-Dielectrics® supports new and existing projects with its technology know-how and develops new manufacturing tools or parts for mass production and refurbishes or adapts automation solutions for existing production lines (150 mm and smaller, up to 300 mm and also 450 mm). This includes fab automation based on SEMI standards. HQ-D® is also partner in various EU funded projects for leading edge technology and semiconductor equipment assessment.
HQ-D® develops process technology to constantly improve the oxide reliability on Si and SiC substrates for high performance chips in the manufacturing production sequences. Basis for that is our industrial experience in semiconductor manufacturing value chain.




HQ-Dielectrics® was founded as a privately owned technology company with main focus on semiconductor and photovoltaic industry

  • Funding by innovations award from the Free State of Bavaria.
  • Various Patents on plasma sticks and technology issued
  • First EU project started: SEAL
  • Various innovation coupons from Baden-Württemberg for extraordinary innovations in the fields of temperature measurement and production systems for the semiconductors industry
  • Shipment of first plasma oxidation process module

Shipment of first fully automated 300 mm plasma oxidation system with atmospheric handling.

  • First shipment of 2.7 µm pyrometers
  • European project SEA4KET

Shipment of first RTP system.

  • hipment of first thermopile based pyrometer
  • ECSEL Joint Undertaking project WAYTOGO FAST funding acceptance through Horizon 2020 and project start

First manual HemeraHT RTP system launched.


Follow up orders for HemeraHT RTP systems.

  • ECSEL Joint Undertaking project REACTION funding acceptance through Horizon 2020 and project start
  • First European 200 mm SiC pilot line

High Temperature Diamond Annealing Sytem (Diamond Cube) launched.


First HemeraHT & HyperionLT Hybrid System order.

Figures, Dates, Facts

Establishment 2010???
Structure ???
Team Size 5 People
Disciplines zeroseven: (Strategische Markenberatung, Crossmediale Kommunikation, Grafik-Design, App-Design-, Web-Design, TYPO3-Programmierung, App-Entwicklung, Shopware-Programmierung, E-Commerce, Suchmaschinenoptimierung und Online-Marketing, Online-Shop Optimierung, Corporate Design, Packaging Design, Corporate Architecture)
Location Dornstadt, Ulm

HQ-Dielectrics® GmbH is committed to the continuous innovation and production of current and future leading-edge process equipment for high-quality dielectrics for our customers in micro- and nanotechnology.

We offer dielectrics technology innovations to help our customers succeed.


Please contact us!

If you are interested in taking part or if you may have any other questions please do not hesitate to contact us. 

E-Mail Contact information