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RTP school

Based upon our broad production experience in semiconductor processing we offer courses in:

  • Technology and process application training for rapid thermal processing (RTP) and plasma oxidation
  • General training covering aspects of RTP designs like heating chambers and temperature measurement
  • Details in process technology from silicide formation through implant activation (soak, spike and flash annealing) and oxidation to high temperature bulk material modification processes
  • Deep insights into rapid thermal processing technology for wide band gap semiconductors, like SiC, GaN, GaAs and others
  • Basic overview training of silicon device technology, including materials and processing overview
  • RTP Course: "Theory and Practice", edited by Dr. J. Niess, co-editing: Dr. Z. Nenyei et al., 16th Edition, Q2/2020